| 等级 |
纯度 |
杂质含量（体积分数） |
ALPHAGAZ™ 1
Air |
O2 20.5% +/- 0.5% abs
N2 Balance
O2+N2 ≥99.9995% |
CO<0.5ppm
CO2<0.5ppm
THC<0.1ppm
H2O<2ppm |
ALPHAGAZ™ 2
Air |
O2 20.5% +/- 0.5% abs
N2 Balance
O2+N2 ≥99.9999% |
| H2<50ppb |
NO2<20ppb |
| CO<50ppb |
N2O<20 ppb |
| CO2<50ppb |
SO2<20ppb |
| THC<50ppb |
H2S<20ppb |
| CH4<50 ppb |
NH3<20ppb |
| NO<20ppb |
H2O<400ppb |
|
Research Grade
Air |
O2 20.5% +/- 0.5% abs
N2 Balance
O2+N2 ≥99.99995% |
| H2<20 ppb |
NO<10ppb |
| CO<30ppb |
NO2<10 ppb |
| CO2<30ppb |
N2O<10ppb |
| THC<30ppb |
SO2<10ppb |
| CH4<30ppb |
H2S<10ppb |
| H2O<200ppb |
NH3<10ppb |
| Particles<0.1μm (30parts/ft3) |
|
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