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Electronics standard gas
Components & Concentration range
Balance
H2 100ppm ~ 4%
N2
HCl  5%
He
HCl 5%   H2 1%
He
HCl  1~5%
N2
SiH4 10ppm ~ 15%
H2、N2、Ar、He
PH3  10ppm ~ 15%
H2、N2、Ar、He
B2H6  10ppm ~ 15%
H2、N2、Ar、He
AsH3  10ppm ~ 15%
H2、N2、Ar、He
HCl  10ppm
N2、He



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Xianxi,Shishan,Nanhai district,Foshan city,Guangdong province,China
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